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2015, :. doi:10.1186/s40712-015-0029-8
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� 2015 Subramonian et al; licensee Springer.
2015, :. doi:10.1186/s40712-015-0029-8
MEMS
CO2 laser
Silicon wafer
ANOVA
Micro-drilling of silicon wafer by industrial CO2 laser
Sivaraos Subramonian
True
MEMS,CO2 laser,Silicon wafer,ANOVA
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