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Table 4 Statistical analysis for the blister defective cluster

From: Interfacial assessment of degraded amorphous silicon module using scanning probe microscopy

Horizontal

distance

(μm)

Vertical distance

(nm)

Surface distance

(μm)

Rmax

Ra

(nm)

RMS Rq

(nm)

Average height (Ra)(nm)

Radius

(nm)

Radius sigma

(nm)

0.265

12.731

0.265

9.971

9.683

9.880

3.625

0.136

0.221

10.613

0.221

11.515

7.322

7.296

3.878

0.102

0.258

10.494

0.258

10.173

9.244

10.035

3.435

0.137