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Table 3 Statistical analysis of the defective sample

From: Interfacial assessment of degraded amorphous silicon module using scanning probe microscopy

Horizontal

distance

(μm)

Vertical distance

(nm)

Surface distance

(μm)

Rmax

Ra

(nm)

RMS Rq

(nm)

Average height (Ra)(nm)

Radius

(nm)

Radius sigma

(nm)

0.516

9.022

0.517

19.184

4.843

2.910

9.417

0.227

0.516

10.790

0.517

17.212

2.939

3.939

3.310

0.003

0.520

6.753

0.521

7.778

2.098

2.580

6.765

0.471